PFPE Vacuum Pump Oil Topda K-H Grades are suggested for applications requiring the highest quality vacuum such as in scanning electron and transmission microscopes, mass spectrometers, particle accelerators, ion implantation, plasma and vapor deposition processes. In addition, it is suggested for pumps handling reactive gases such as UF6, F2, oxygen, ozone and tritium, as the fluid can be used in direct contact with these gases without reaction and fluid degradation.
|Properties||Units||K-H 1808||K-H 2509||K-H 4009||K-H 14013|
|Equivalent Product||Fomblin Y HVAC 140/13|
|Average Molecular Weight||a.m.u.||2,800||3,400||4,400||7,600|
|Density at 20°C||1.89||1.90||1.91||1.92|
|Viscosity at 20°C||cSt||185||285||474||1400|
|Specific Heat at 20°C||cal/g||0.24||0.24||0.24||0.24|
|Heat of vaporization at 200°C||cal/g||9||7||7||5|